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Flexible white-light scanning for multiple surface finishes
The sensor has a measurement range of several millimeters while achieving a resolution in the nanometric range. In combination with a large acceptance angle of up to ±30°, it provides very versatile measurement possibilities, making it ideally suited to measure anything from small features to large surfaces.
HP-OW probes are available in three variations, making it possible to adapt to different measurement ranges, working distances, and other metrology requirements. When combined with the HR-R sensor rack, inspection cycle time is significantly reduced.
Benefits And Features
Challenging surfaces measurement
Measure challenging surfaces such as shiny surfaces, glass and other transparent/reflective or sensitive materials. In addition, the thickness of workpiece areas.
Spiral scan calibration
Spirals over the calibration sphere, resulting in significant reduction of the process time.
Automatic probe exchange
Sensor can be exchanged during the measurement program with different Hexagon sensors to achieve the highest possible levels of flexibility.
Training and Resources
Support
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Flexible white-light scanning for multiple surface finishes
The sensor has a measurement range of several millimeters while achieving a resolution in the nanometric range. In combination with a large acceptance angle of up to ±30°, it provides very versatile measurement possibilities, making it ideally suited to measure anything from small features to large surfaces.
HP-OW probes are available in three variations, making it possible to adapt to different measurement ranges, working distances, and other metrology requirements. When combined with the HR-R sensor rack, inspection cycle time is significantly reduced.
HP-OW Optical Sensor Specifications
Measuring range | |
---|---|
2 mm (HP-OW-2.14) 2 mm (HP-OW-2.61) 3 mm (HP-OW-3.22) | |
Working distance | |
14.1 mm (HP-OW-2.14) 61 mm (HP-OW-2.61) 22.5 mm (HP-OW-3.22) | |
Spot diameter | |
12 μm (HP-OW-2.14) 12.5 μm (HP-OW-2.61) 12 μm (HP-OW-3.22) | |
Resolution in Z direction | |
66 nm (HP-OW-2.14) 66 nm (HP-OW-2.61) 100 nm (HP-OW-3.22) | |
Acceptance angle | |
+/- 30° (HP-OW-2.14) +/- 15° (HP-OW-2.61) +/- 30° (HP-OW-3.22) | |
Max. thickness | |
3 mm (HP-OW-2.14) 3 mm (HP-OW-2.61) 4.5 mm (HP-OW-3.22) | |
Mounting | |
HH-AS8-OWT2.5 (HP-OW-2.14) HH-AS8-OWT2.5 (HP-OW-2.61) HH-F-OWT (HP-OW-3.22) | |
Probing size error | |
4.6 μm (HP-OW-2.14) 4.6 μm (HP-OW-2.61) 5 μm (HP-OW-3.22) |
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